ASML required high resolution (mK) temperature mapping within the lithography machine. As a research topic, ASML was investigating the feasibility of a single fiber alternative to 100 electrical wires to accommodate 50 NTCs in a small surface area.
To achieve high resolution interrogation the complete assessment of every used component was required. Items considering FBG parameters (FWHM, reflectivity), SLD-noise, Electronics noise, and others, enabled a well-educated estimate of the final performance of the system.
The single fiber proved itself a more than suitable alternative for NTCs.